Electronic Gas Mixtures
Zhicheng Gas offers a range of electronic-grade specialty gas mixtures for semiconductor and electronics manufacturing processes.
| Product Name | Components | Formula |
|---|---|---|
| Silane Mixtures | Silane - 20% SiH4 in N2 | SiH4 + N2 |
| Silane - 2.99% SiH4 in N2 | SiH4 + N2 | |
| Phosphine Mixtures | Phosphine - 10% PH3 in H2 | PH3 + H2 |
| Phosphine - 1% PH3 in H2 | PH3 + H2 | |
| Disilane Mixtures | Disilane - 200ppm Si2H6 in H2 | Si2H6 + H2 |
| Disilane - 2% Si2H6 in H2 | Si2H6 + H2 | |
| Ethylborane Mixtures | Ethylborane - 5% B2H6 in N2 | B2H6 + N2 |
| Ethylborane - 1% B2H6 in H2 | B2H6 + H2 | |
| Germanane Mixtures | Germanane - 10% GeH4 in H2 | GeH4 + H2 |
