Product Overview
| Property | Value |
|---|
| Product Name | Hexafluoroethane C2F6 |
| CAS No. | 76-16-4 |
| UN Number | UN2193 |
| Purity | 99.9% / 99.999% |
| Packing | 40L cylinder (GB, ISO, DOT) |
| Filling Content | 40kg/cyl |
Transportation
| Property | Value |
|---|
| DOT Shipping Name | Hexafluoroethane |
| DOT Classification | 2.2 |
| DOT Label | Nonflammable Gas |
| Shipped as | Liquefied Gas |
Technical Information
| Property | Value |
|---|
| Cylinder State @ 21.1°C | Liquid |
| Molecular Weight | 138.01 g/mol |
| Specific Gravity (air=1) | 4.76 |
| Critical Temperature | 19.7 °C |
| Flammable Limits in Air | Non-flammable |
Applications
Hexafluoroethane (C2F6) is used in the semiconductor industry for plasma etching and CVD chamber cleaning. It is also used as a low-temperature refrigerant and cryogenic applications. In the electronics industry, C2F6 is used for dielectric etching of silicon dioxide and silicon nitride layers.
