Product Overview
| Property | Value |
|---|
| Product Name | Halocarbon 14 - Tetrafluoromethane CF4 |
| CAS Number | 75-73-0 |
| UN Number | UN1982 |
| Packing | 40L, 44L, 47L, 50L cylinder (GB, ISO, DOT) |
| Filling Content | 30kg/cyl |
| Shipped as | Compressed Gas |
Specifications
| Items | 99.9% | 99.999% |
|---|
| CF4 | 99.9% | 99.999% |
| O2 | ≤100 ppmv | ≤1.0 ppmv |
| N2 | ≤400 ppmv | ≤4.0 ppmv |
| CO2 | ≤80 ppmv | ≤0.5 ppmv |
| CO | ≤50 ppmv | ≤0.5 ppmv |
| CH4 | ≤50 ppmv | ≤0.5 ppmv |
| Other Halocarbons | ≤100 ppmv | ≤2.0 ppmv |
| H2O | ≤10 ppmv | ≤2.0 ppmv |
| SF6 | ≤15 ppmv | ≤1.0 ppmv |
| Acidity as HF | ≤1.0 ppmv | ≤0.1 ppmv |
Transportation & Technical Information
| DOT Classification | 2.2 - Nonflammable Gas |
| CGA/DISS/JIS | 320/716/W22-14L |
| Molecular Weight | 88.01 g/mol |
| Specific Gravity (air=1) | 3.04 |
| Critical Temperature | -45.65 °C |
Applications
One of the largest consumption kinds of plasma etching gases in microelectronics industry, also widely used in surface cleaning of electronic devices, manufacture of solar cells, laser technology, gas phase insulation, subzero refrigeration, leakage inspection agent and decontaminant of manufacture of printed circuits.
