Product Overview
| Property | Value |
|---|
| Product Name | Halocarbon C318 - Octafluorocyclobutane C4F8 |
| CAS Number | 115-25-3 |
| UN Number | UN 1976 |
| Packing | 40L, 44L, 47L, 50L cylinder (GB, ISO, DOT) |
| Filling Content | 40kg/cyl |
| Shipped as | Liquefied Gas |
Specifications
| Items | 99.9% | 99.999% |
|---|
| C4F8 | 99.9% | 99.999% |
| O2 | ≤80 ppmv | ≤1.0 ppmv |
| N2 | ≤300 ppmv | ≤3.0 ppmv |
| CO2 | ≤50 ppmv | ≤0.5 ppmv |
| CO | ≤30 ppmv | ≤0.5 ppmv |
| CH4 | ≤30 ppmv | ≤0.5 ppmv |
| H2O | ≤10 ppmv | ≤3.0 ppmv |
| Other Organics | ≤600 ppmv | ≤5.0 ppmv |
| Acidity as HCl | ≤1.0 ppmw | ≤0.1 ppmw |
Transportation & Technical Information
| DOT Classification | 2.2 - Nonflammable Gas |
| CGA/DISS/JIS | 660/716/W22-14L |
| Molecular Weight | 200.03 g/mol |
| Specific Gravity (air=1) | 7.33 |
| Critical Temperature | 115.2 °C |
Applications
Perfluorocyclobutane (C4F8) is used in semiconductor manufacturing as plasma etching of silicon dioxide (SiO2) or silicon layers.
