Product Overview
| Property | Value |
|---|
| Product Name | Halocarbon 41 - Fluoromethane CH3F |
| CAS Number | 593-53-3 |
| UN Number | UN2810 |
| Packing | 40L, 47L, 50L cylinder (GB, ISO, DOT) |
| Filling Content | 40kg/cyl |
| Shipped as | Liquefied Gas |
Specifications
| Items | 99.5% | 99.995% |
|---|
| CH3F | 99.5% | 99.995% |
| O2 | ≤20 ppbv | ≤5 ppmv |
| N2 | ≤70 ppbv | ≤20 ppmv |
| CO2 | - | ≤10 ppmv |
| CO | - | ≤10 ppmv |
| CH4 | - | ≤5 ppmv |
| H2O | ≤10 ppbv | ≤2 ppmv |
Transportation & Technical Information
| DOT Classification | 2.1 - Inflammable Gas |
| CGA/DISS/JIS | 350/724/W22-14L |
| Molecular Weight | 34.03 g/mol |
| Specific Gravity (air=1) | 1.18 |
| Critical Temperature | 45 °C |
Applications
In semiconductor manufacturing, fluoromethane is a plasma etching gas of silicon compound films.
