Hydrogen Chloride

Hydrogen Chloride

Hydrogen Chloride (HCl) is used in electronics for selective etching and in semiconductor fabrication for CVD reactor cleaning. Purity: 99.9%-99.999%. CAS: 7647-01-0, UN: UN1050.

Category: High-Purity Gases

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Product Details

Product Overview

PropertyValue
Product NameHydrogen Chloride HCl
CAS Number7647-01-0
UN NumberUN 1050
Packing40L, 44L, 47L, 50L cylinder (GB, ISO, DOT)
Filling Content25kg/cylinder
Shipped asLiquefied Gas

Specifications

Items99.9%99.999%
HCl99.9%99.999%
O2≤10 ppmv≤0.5 ppmv
N2≤10.0 ppmv≤2.0 ppmv
CO2≤5.0 ppmv≤2.0 ppmv
CO≤5.0 ppmv≤1.0 ppmv
CH4≤5.0 ppmv≤0.3 ppmv
H2O≤2.0 ppmv≤1.0 ppmv
Iron-≤1.0 ppmv

Transportation & Technical Information

DOT Classification2.3 - Poison Gas, Inhalation Hazard, Corrosive Gas
CGA/DISS/JIS/BS341/DIN477330/634/W26-14R/NO.6/NO.8
Molecular Weight36.461 g/mol
Specific Gravity (air=1)1.19
Critical Temperature51.54 °C

Applications

In the electronics industry as carrier for non-volatile elements and in selective etching. In semiconductor fabrication: etching of native oxide prior to epitaxial deposition; CVD reactor cleaning, moisture getter in CVD oxides.