Product Overview
| Property | Value |
|---|
| Product Name | Nitrogen Trifluoride NF3 |
| CAS Number | 7783-54-2 |
| UN Number | UN 2451 |
| Packing | 40L, 47L, 50L cylinder (GB, ISO, DOT) |
| Filling Content | 20kg/cyl |
| Shipped as | Liquefied Gas |
Specifications
| Items | Specifications |
|---|
| NF3 | 99.99% |
| O2 | ≤3.0 ppmv |
| N2 | ≤5.0 ppmv |
| CO2 | ≤1.0 ppmv |
| CO | ≤1.0 ppmv |
| CH4 | ≤1.0 ppmv |
| H2O | ≤1.0 ppmv |
| CF4 | ≤1.0 ppmv |
| N2O | ≤2.0 ppmv |
| SF6 | ≤1.0 ppmv |
| HF | ≤1.0 ppmv |
Transportation & Technical Information
| DOT Classification | 2.2 - Nonflammable Gas and Oxidizer |
| DISS/JIS/DIN477 | 640/W22-14L/NO.6 |
| Molecular Weight | 71 g/mol |
| Specific Gravity (air=1) | 2.46 |
| Critical Temperature | -39.15 °C |
Applications
Used for cleaning CVD Chamber or etching vapor deposition layer (film) during the production process of semiconductor, TFT-LCD and solar cell.
